Abstract (may include machine translation)
Heteroepitaxial growth of highly strained structures offers the possibility to fabricate islands with very narrow size distribution, coined self-assembling quantum dots (SAQD). In spite of the high experimental interest, the mechanism of SAQD formation is not well understood. We will show that equilibrium theories can successfully predict the island sizes and densities, the nature and the magnitude of the critical thickness needed to be deposited for SAQD formation, as well as the onset of ripening. Furthermore, the flux and temperature dependence of the SAQDs is described using kinetic Monte Carlo simulations.
Original language | English |
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Pages (from-to) | 23-30 |
Number of pages | 8 |
Journal | Materials Science and Engineering B: Solid-State Materials for Advanced Technology |
Volume | 67 |
Issue number | 1 |
DOIs | |
State | Published - 8 Dec 1999 |
Externally published | Yes |
Event | Proceedings of the 1999 1st Lawrence Symposium on Critical Issues in Epitaxy - Mesa, AZ, USA Duration: 6 Jan 1999 → 9 Jan 1999 |