Abstract (may include machine translation)
In the context of linear cascade theory, we derive a stochastic nonlinear equation to describe the evolution and scaling properties of surfaces eroded by ion bombardment. The coefficients appearing in the equation are calculated explicitly in terms of the physical parameters characterizing the sputtering process. We find that transitions may take place between various scaling behaviors when experimental parameters such as the angle of incidence of the incoming ions or their average penetration depth, are varied.
Original language | English |
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Pages (from-to) | 299-304 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 367 |
State | Published - 1995 |
Externally published | Yes |
Event | Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: 28 Nov 1994 → 2 Dec 1994 |