Roughening by ion bombardment: a stochastic continuum equation

R. Cuerno, A. L. Barabasi

Research output: Contribution to journalConference articlepeer-review

Abstract (may include machine translation)

In the context of linear cascade theory, we derive a stochastic nonlinear equation to describe the evolution and scaling properties of surfaces eroded by ion bombardment. The coefficients appearing in the equation are calculated explicitly in terms of the physical parameters characterizing the sputtering process. We find that transitions may take place between various scaling behaviors when experimental parameters such as the angle of incidence of the incoming ions or their average penetration depth, are varied.

Original languageEnglish
Pages (from-to)299-304
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume367
StatePublished - 1995
Externally publishedYes
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: 28 Nov 19942 Dec 1994

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