Nanoscale wire formation on sputter-eroded surfaces

J. Kim; B. Kahng; A. L. Barabási

doi:10.1063/1.1519963

Nanoscale wire formation on sputter-eroded surfaces

J. Kim^*, B. Kahng, A. L. Barabási

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract (may include machine translation)

Rotated ripple structures (RRS) on sputter-eroded surfaces are potential candidates for nanoscale wire fabrication. We show that the RRS can form when the width of the collision cascade in the longitudinal direction is larger than that in the transverse direction and the incident angle of ion beam is chosen in a specific window. By calculating the structure factor for the RRS, we find that they are more regular and their amplitude is more enhanced compared to the much studied ripple structure forming in the linear regime of sputter erosion.

Original language	English
Pages (from-to)	3654-3656
Number of pages	3
Journal	Applied Physics Letters
Volume	81
Issue number	19
DOIs	https://doi.org/10.1063/1.1519963
State	Published - 4 Nov 2002
Externally published	Yes

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10.1063/1.1519963

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title = "Nanoscale wire formation on sputter-eroded surfaces",

abstract = "Rotated ripple structures (RRS) on sputter-eroded surfaces are potential candidates for nanoscale wire fabrication. We show that the RRS can form when the width of the collision cascade in the longitudinal direction is larger than that in the transverse direction and the incident angle of ion beam is chosen in a specific window. By calculating the structure factor for the RRS, we find that they are more regular and their amplitude is more enhanced compared to the much studied ripple structure forming in the linear regime of sputter erosion.",

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Nanoscale wire formation on sputter-eroded surfaces

Abstract (may include machine translation)

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