Dynamic scaling of ion-sputtered surfaces

Research output: Contribution to journalArticlepeer-review

Abstract (may include machine translation)

We derive a stochastic nonlinear equation to describe the evolution and scaling properties of surfaces eroded by ion bombardment. The coefficients appearing in the equation can be calculated explicitly in terms of the physical parameters characterizing the sputtering process. We find that transitions may take place between various scaling behaviors when experimental parameters, such as the angle of incidence of the incoming ions or their average penetration depth, are varied.

Original languageEnglish
Pages (from-to)4746-4749
Number of pages4
JournalPhysical Review Letters
Volume74
Issue number23
DOIs
StatePublished - 1995
Externally publishedYes

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